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크림룸의 기준미연방기술기준
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FEDERAL STANDARD 209E Airborne Particulate Cleanliness Classes in Cleanrooms and Clean Zones
Revised 1992 by the Institute of Environmental Sciences 940 E. Northwest Highway Mount Prospect, Illinois 60056 (708) 255-1561• Fax (708) 255-1699
Approved by the U.S. General Services Administration
[METRIC) FED-STD-209E September 11, 1992 SUPERSEDING FED-STD-209D June 15, 1988
FEDERAL STANDARD AIRBORNE PARTICULATE CLEANLINESS CLASSES IN CLEANROOMS AND CLEAN ZONES
This Standard is approved by the Commissioner, Federal Supply Service, General Services Administration, for the use of all Federal agencies.
DISTRIBUTION STATEMENT A: Approved for public release; distribution is unlimited.
FSC 3694
FED-STD-209E September 11, 1992
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2011.03.26
56페이지
